Home > Techncal Services > Instrumentation and Mechanics
Instrumentation and Mechanics
Instrumentation and mechanics
Goals :
- Design and realization of deposition systems (8 working at the moment and 3 more on the conception stage)
- Design and realization of special pieces of the experimental set-up (15 electrical and optical experimental set-up and Gamais)
- Management of precursor gas related systems
- Infrastructural work: move of deposition facilities
- Safety in the lab
- Design and set up of deposition systems in the future Thales Cleanroom next January 2005 (3 new systems in the design phase)
Example of a RF PECVD deposition system
 |
| Principle of operation and management |
 |
| Hydrogen source |
Example of concept and design of Deposition Systems :
 |
 |
 |
texte
 | ||
 | ||
 | ||
Differential pressure and heated substrate holder |
