Introduction
Main Research Activities
- Silicon based thin films and nanomaterials
- Large area electronic applications
- Carbone nanotubes and applications
- Polarimetric instrumentation and applications
Overview
Staff : 56 persons including 26 permanents, 8 teachers at Ecole Polytechnique, 15 PhD and 3 Master students
- Occupied area (inside Ecole polytechnique campus) : about 1000 m2
- Budget : about 2 M€ per year (including salaries) including 0.5 M of grants and industrial contracts
Know-How
- Plasma synthesis of semiconductor thin films, amorphous, polymorphous or microcrystalline
- silicon alloys dielectric films
- monitoring and real time control of thin film growth by spectroellipsometry
- cluster-surface interaction
- Molecular dynamics simulations
- Thin film photovoltaic devices
- Thin film transistors for large area electronic applications
- Carbon thin films and nanotubes synthesis
- Development of spectroscopic ellipsometers and polarimeters
- Applications of polarimetry
Methods and facilities
- Plasma Enhanced Chemical Vapor Deposition (PECVD) based on radiofrequency discharges
- PECVD using Distributed Electron Cyclotron Resonance
- Hot Wire CVD
- In situ spectroellipsometry analysis of PECVD
- Spectroellipsometry from deep UV to infrared
- Raman spectroscopy
- Time Resolved Microwave Conductivity
- Surface science instrumental set-up
Application area
- Plasma processes
- Solar cells
- Large area electronic applications (AMLCD, OLED)
- Photodetection
- Thin film coatings
- Instrumentation in optics
- Optical metrology in microelectronics
- Biomedical applications of polarimetry