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Laboratory of Physics of Interfaces and Thin Films

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Introduction

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Introduction

Main Research Activities

  • Silicon based thin films and nanomaterials
  • Large area electronic applications
  • Carbone nanotubes and applications
  • Polarimetric instrumentation and applications

Overview



Staff : 56 persons including 26 permanents, 8 teachers at Ecole Polytechnique, 15 PhD and 3 Master students
  • Occupied area (inside Ecole polytechnique campus) : about 1000 m2
  • Budget : about 2 M€ per year (including salaries) including 0.5 M of grants and industrial contracts

Know-How


  • Plasma synthesis of semiconductor thin films, amorphous, polymorphous or microcrystalline
  • silicon alloys dielectric films
  • monitoring and real time control of thin film growth by spectroellipsometry
  • cluster-surface interaction
  • Molecular dynamics simulations
  • Thin film photovoltaic devices
  • Thin film transistors for large area electronic applications
  • Carbon thin films and nanotubes synthesis
  • Development of spectroscopic ellipsometers and polarimeters
  • Applications of polarimetry


     

Methods and facilities


  • Plasma Enhanced Chemical Vapor Deposition (PECVD) based on radiofrequency discharges
  • PECVD using Distributed Electron Cyclotron Resonance
  • Hot Wire CVD
  • In situ spectroellipsometry analysis of PECVD
  • Spectroellipsometry from deep UV to infrared
  • Raman spectroscopy
  • Time Resolved Microwave Conductivity
  • Surface science instrumental set-up

Application area


  • Plasma processes
  • Solar cells
  • Large area electronic applications (AMLCD, OLED)
  • Photodetection
  • Thin film coatings
  • Instrumentation in optics
  • Optical metrology in microelectronics
  • Biomedical applications of polarimetry

Research themes


Nanostructured Semiconductors and Thin Films
Large Area Electronics
Carbon Nanotubes and Applications
Polarimetry and Applications